Preparation of PZT Ferroelectric Thin Film by the Sol-Gel Process AITranslate

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Chinese Library Classification Number:TM223[一般工业技术—材料科学与工程]

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Lead zirconate titanate (PZT) thin films are prepared on the substrates of monocrystal Si,PLT/Si,PT/Si/and proton-exchanged(PE)LiNbO3 by sol-gel process.Interface diffusion and the effect of Pb content on the films crystallization were investigated.In all cases,excess Pb(CH3COO)2 was added to avoid the formation of pb-deficient pyrochlore.