Process Design and Quality Control of Mo Wafers Production AITranslate
Abstract AITranslate
Summary is made on the several years of product development and design experiences.Analysis and comparison is made of the Mo disk process with emphasis on overall discussion regarding the process design and quality control of Mo wafers production by Mo plate punching and machining.
KeyWords AITranslate
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Basic Information:
DOI：
Chinese Library Classification Number:TG146.412[金属学及工艺—金属材料]
Citation Information:
Summary is made on the several years of product development and design experiences.Analysis and comparison is made of the Mo disk process with emphasis on overall discussion regarding the process design and quality control of Mo wafers production by Mo plate punching and machining.
quote
| GB/T 7714-2015 | [1] CHEN Qi-ming. Process Design and Quality Control of Mo Wafers Production[J]. Rare Metals and Cemented Carbides, 2001(4): 30-35. |
| MLA | [1] CHEN Qi-ming. "Process Design and Quality Control of Mo Wafers Production." Rare Metals and Cemented Carbides, no. 4, 2001, pp. 30-35. |
| APA | [1] CHEN Qi-ming. (2001). Process Design and Quality Control of Mo Wafers Production. Rare Metals and Cemented Carbides(4), 30-35. |
| IEEE | [1] CHEN Qi-ming, "Process Design and Quality Control of Mo Wafers Production," Rare Metals and Cemented Carbides, no. 4, pp. 30-35, 2001. keywords: {Mo wafer;substrate;process design;quality control} |