Preparation of ITO Target Material by Spraying Drying-Cold Isostatic Pressing-Sintering AITranslate
Abstract AITranslate
The ITO powders were prepared by chemical precipitation and then used to prepare the ITO target material by spraying drying-cold isostatic pressing-sintering.The surface morphology and pore distribution of powder,bisque body and sintered ITO target material were examined by SEM.The influences of different powder particle size distribution on pressing and sintering of the target material were discussed.The results indicate that the ITO target material with a relative density over 97% can be obtained by spraying drying-cold isostatic pressing-sintering.Spraying drying can effectively enhance the fluidity and pressing performance of powder,and the bisque body mainly composed of small particles shows a higher sintering density.
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Basic Information:
DOI：
Chinese Library Classification Number:TB383[一般工业技术—材料科学与工程]
Citation Information:
The ITO powders were prepared by chemical precipitation and then used to prepare the ITO target material by spraying drying-cold isostatic pressing-sintering.The surface morphology and pore distribution of powder,bisque body and sintered ITO target material were examined by SEM.The influences of different powder particle size distribution on pressing and sintering of the target material were discussed.The results indicate that the ITO target material with a relative density over 97% can be obtained by spraying drying-cold isostatic pressing-sintering.Spraying drying can effectively enhance the fluidity and pressing performance of powder,and the bisque body mainly composed of small particles shows a higher sintering density.
quote
| GB/T 7714-2015 | [1] LI Jing, ZHAO Xiao-dong, LI Zhi-hua, et al. Preparation of ITO Target Material by Spraying Drying-Cold Isostatic Pressing-Sintering[J]. Rare Metals and Cemented Carbides, 2011(2): 38-41. |
| MLA | [1] LI Jing, et al., "Preparation of ITO Target Material by Spraying Drying-Cold Isostatic Pressing-Sintering." Rare Metals and Cemented Carbides, no. 2, 2011, pp. 38-41. |
| APA | [1] LI Jing, ZHAO Xiao-dong, LI Zhi-hua, & REN Dong-yan. (2011). Preparation of ITO Target Material by Spraying Drying-Cold Isostatic Pressing-Sintering. Rare Metals and Cemented Carbides(2), 38-41. |
| IEEE | [1] LI Jing, ZHAO Xiao-dong, LI Zhi-hua, and REN Dong-yan, "Preparation of ITO Target Material by Spraying Drying-Cold Isostatic Pressing-Sintering," Rare Metals and Cemented Carbides, no. 2, pp. 38-41, 2011. keywords: {ITO target material;spraying drying;cold isostatic pressing;sintering} |