Structural Characterization of ITO Conductive and Transparent Film Prepared By Sol-gel Technique AITranslate
Abstract AITranslate
Indium tin oxide (ITO) conductive and transparent film is prepared on quartz glass matrix from In(NO_3) and acetylacetone by sol-gel dip-coating technique with anhydrous SnCl_4 as the dopant.The phase transformation process,the surface structure,the microscopic morphology and physical properties of the film were measured and analyzed by XRD,SED,IR,4-probe method and UV-VIS spectrometer.The experimental results showed that it is absolutely feasible to fabricate ITO film on the quartz matrix by sol-gel technique,and the ITO film has the micro-structure accumulated by several particles and ITO film has the cubic bixbyite crystal structure,and[111] is its preferred orientation.The thickness of ITO film was below 150nm upon five times dip-coating ,the square-wave resistance of the film is about 110 Ω with resistivity about 1.65×10-2 Ω·cm and>90% transmittancy.
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Basic Information:
DOI：
Chinese Library Classification Number:TB383[一般工业技术—材料科学与工程]
Citation Information:
Indium tin oxide (ITO) conductive and transparent film is prepared on quartz glass matrix from In(NO_3) and acetylacetone by sol-gel dip-coating technique with anhydrous SnCl_4 as the dopant.The phase transformation process,the surface structure,the microscopic morphology and physical properties of the film were measured and analyzed by XRD,SED,IR,4-probe method and UV-VIS spectrometer.The experimental results showed that it is absolutely feasible to fabricate ITO film on the quartz matrix by sol-gel technique,and the ITO film has the micro-structure accumulated by several particles and ITO film has the cubic bixbyite crystal structure,and[111] is its preferred orientation.The thickness of ITO film was below 150nm upon five times dip-coating ,the square-wave resistance of the film is about 110 Ω with resistivity about 1.65×10-2 Ω·cm and>90% transmittancy.
quote
| GB/T 7714-2015 | [1] LI Zhi-hua, LI Jing, REN Dong-yan. Structural Characterization of ITO Conductive and Transparent Film Prepared By Sol-gel Technique[J]. Rare Metals and Cemented Carbides, 2004(4): 21-24. |
| MLA | [1] LI Zhi-hua, et al., "Structural Characterization of ITO Conductive and Transparent Film Prepared By Sol-gel Technique." Rare Metals and Cemented Carbides, no. 4, 2004, pp. 21-24. |
| APA | [1] LI Zhi-hua, LI Jing, & REN Dong-yan. (2004). Structural Characterization of ITO Conductive and Transparent Film Prepared By Sol-gel Technique. Rare Metals and Cemented Carbides(4), 21-24. |
| IEEE | [1] LI Zhi-hua, LI Jing, and REN Dong-yan, "Structural Characterization of ITO Conductive and Transparent Film Prepared By Sol-gel Technique," Rare Metals and Cemented Carbides, no. 4, pp. 21-24, 2004. keywords: {ITO film;sol-gel;structure characterization} |