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Ultrathin Amorphous Gallium Oxide Vacuum Ultraviolet Photodetectors Ultrathin Amorphous Gallium Oxide Vacuum Ultraviolet Photodetectors AITranslate

Samuel H. Amsterdam; Anil U. Mane; Alex B. F. Martinson
Argonne National Laboratory; Argonne National Laboratory; Argonne National Laboratory
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Publisher: ACS
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Abstract AITranslate

Gallium oxide is demonstrated to be an effective material for the detection of vacuum-ultraviolet (VUV) photons. Nanometer thick films of amorphous gallium oxide deposited by atomic layer deposition are found to exhibit large absorptivity in the VUV region 120–200 nm. We leverage the strong absorption of the ultrathin film to fabricate self-powered Schottky diode photodetectors using graphene as a VUV-transparent electrode. Responsivity throughout the VUV is calculated, significantly extending the demonstrated spectral range of gallium oxide-based photodetectors.

KeyWords AITranslate

vacuumultraviolet amorphous gallium oxide graphene photodetector atomic layer deposition
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Basic Information:

DOI：https://doi.org/10.1021/acsaelm.3c00918

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Citation Information:

Gallium oxide is demonstrated to be an effective material for the detection of vacuum-ultraviolet (VUV) photons. Nanometer thick films of amorphous gallium oxide deposited by atomic layer deposition are found to exhibit large absorptivity in the VUV region 120–200 nm. We leverage the strong absorption of the ultrathin film to fabricate self-powered Schottky diode photodetectors using graphene as a VUV-transparent electrode. Responsivity throughout the VUV is calculated, significantly extending the demonstrated spectral range of gallium oxide-based photodetectors.

quote

GB/T 7714-2015 [1] Samuel H. Amsterdam, Anil U. Mane, Alex B. F. Martinson. ACS Applied Electronic Materials, 2023(5). DOI:10.1021/acsaelm.3c00918.
MLA [1] Samuel H. Amsterdam, et al., ACS Applied Electronic Materials, no. 5, 2023, https://doi.org/10.1021/acsaelm.3c00918.
APA [1] Samuel H. Amsterdam, Anil U. Mane, & Alex B. F. Martinson. (2023). ACS Applied Electronic Materials(5). https://doi.org/10.1021/acsaelm.3c00918
IEEE [1] Samuel H. Amsterdam, Anil U. Mane, and Alex B. F. Martinson, ACS Applied Electronic Materials, no. 5, 2023, doi: 10.1021/acsaelm.3c00918. keywords: {vacuumultraviolet amorphous gallium oxide graphene photodetector atomic layer deposition}