Impact of Different Pressure on the Properties of Me-DLC AITranslate

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Chinese Library Classification Number:TB381[一般工业技术—材料科学与工程]

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In the paper is introduced DLC film preparation new method of ECR(electron cyclontron resonance) by microwave plasma gas deposition in combination with magnetron sputtering.Carbon films with Ti/TiN/TiN(N,C)intermediate layer were fabricated on stainless steel substrates by sputtering graphite target and Ti target.Study is made on the influence of the gas flowrate on the film surface morphology,hardness,friction and wearing property and surface energy.