Interfacial Engineering Strategies for Efficient Spin–Orbit Torque Devices with Pt Alloys Interfacial Engineering Strategies for Efficient Spin–Orbit Torque Devices with Pt Alloys AITranslate

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DOI：https://doi.org/10.1021/acsaelm.2c01499

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To make spin–orbit torque magnetic random-access memories (SOT-MRAMs) become competitive enough to replace the contemporary memory architecture, it is of great importance to utilize conductive SOT materials that possess large damping-like spin–orbit torque (DL-SOT) efficiencies and back-end-of-line (BEOL) compatibility. In this work, we report a BEOL-compatible CoFeB/MgO-based heterostructure with the Pt–Cr alloy as the spin current source (SCS) and inserted a Pt/Co/Pt composite layer to achieve texture decoupling and ferromagnetic coupling. A thermally robust perpendicular magnetic anisotropy (PMA) of the hybrid heterostructure can be retained after annealing at 400 °C for 1 h, while maintaining large DL-SOT efficiencies of the annealed Pt–Cr alloys (ξDL ∼ 0.34 for Pt0.70Cr0.30). Additionally, by optimizing the current distribution with a resistive Pt spacer layer, it is possible to simultaneously enhance the current-to-effective field conversion ratio (Hzeff/I) and retain the apparent ξDL (ξDL ∼ 0.37 for Pt0.79Cr0.21). Moreover, the critical switching current density can be reduced from JcPt ∼ 2.0 × 107 A·cm–2 for Pt to JcPt0.70Cr0.30 ∼ 4.9 × 106 A·cm–2 for Pt0.70Cr0.30 without tampering the thermal stability of the annealed heterostructure. These interfacial engineering strategies provide directions to integrate Pt-based SCSs with large ξDL into a BEOL-compatible platform for future SOT-MRAM devices with PMA.