daohang fenxiangbox searchbox qikanlogonew daohangnew searchboxnew navrightzone footerzone paper

Research Progress in Recovery and Regeneration of Gallium Arsenide Waste AITranslate

1.Key Laboratory of Vacuum Metallurgy for Nonferrous Metal of Yunnan Province,Kunming University of Science and Technology,Kunming 650093,China
2.State Key Laboratory of Complex Non-Ferrous Metal Resources Clear Utilization,Kunming University of Science and Technology,Kunming 650093,China
3.National Engineering Research Center of Vacuum Metallurgy,Kunming University of Science and Technology,Kunming 650093,China
4.School of Metallurgy and Energy Engineering,Kunming University of Science and Technology,Kunming 650093,China
AITranslate
Publisher: Youke Publishing Co., Ltd
Share Citation Information Add to Favorites Download PDF

    Scan to share on WeChat or Moments

Use WeChat scan.
Share with WeChat friends or Moments

Abstract AITranslate

With the progress and development of science and technology,the second-generation semiconductor materials represented by gallium arsenide (GaAs) have gradually replaced silicon materials in electronic communications,national defense,aerospace and other fields. Every year,a large amount of GaAs wastes are generated from the crystal growth in upstream,design and processing in midstream and scrap in downstream of the GaAs industry chain. Without in time treatment,the arsenic in GaAs wastes may enter the soil or groundwater with human activities and geological processes,posing a threat to the natural environment and human health. GaAs wastes are one of the main sources of arsenic and gallium resources because of its high grade and large stock. The clean and efficient recycling of GaAs wastes have received wide attention in recent years. This article started from the perspective of the gallium arsenide industry chain,the different recovery processes of GaAs crystal cutting scrap from upstream,GaAs processing wastes from midstream and used GaAs electronic devices were reviewed. The purity of GaAs scrap produced by cutting in the upstream of the industry chain was high,both wet and fire processes could achieve effective separation and recovery of arsenic and gallium. Acid leaching of GaAs cutting scrap,combined with selective precipitation,extraction,resin adsorption and alkaline electrolysis to recover gallium was a relatively mature technology for industrial recovery of GaAs at present. However,a large amount of acidic solution was added in the wet process and the generation of arsenic-containing waste water was inevitable. The processing process and production costs would increase as a result. In contrast,the fire process had shorter processes and simpler operations. But the oxidation roasting method and sulfurization heat treatment method also had the possibility of producing toxic gases containing arsenic. As a new method in recent years,the vacuum decomposition method recovered gallium and arsenic directly in elemental form under vacuum conditions,which had obvious advantages in terms of safety and efficiency,and it was one of the most promising GaAs recovery processes at present. However,the presence of GaAs clusters always affected the recovery rate,and further in-depth study was still needed. GaAs processing process in the middle reaches of the industrial chain such as cutting and grinding generated a large amount of GaAs containing waste water. The composition of waste slag and sludge from GaAs processing waste water by coagulation and sedimentation of iron compounds were complex. Impurities such as mixed iron had a major impact on the subsequent recovery process. Therefore,iron removal became a key issue in the recovery of GaAs processing wastes. Additives with stronger binding ability to Ga3+ were usually selected to extract gallium. Sometimes,arsenic and gallium resources in GaAs processing wastes were also prepared into compound products such as gallium oxide and sodium arsenate crystals. It was beneficial to shorten the waste recovery process,reduce the treatment cost and the discharge of arsenic-containing waste liquid. At the same time,it met the needs of gallium oxide semiconductor,sodium arsenate drugs and other aspects of China. In the downstream of the industry chain,GaAs was encased in organic casings in used electronic devices such as light-emitting diodes (LED),integrated circuits (ICs) and solar cells. The efficient removal of organic matter from used GaAs containing devices,extraction of GaAs and recycling of arsenic and gallium had become a research hotspot for many scholars. The hydrothermal treatment and thermal decomposition were the main methods to remove surface organic matter. The treatment effect of hydrothermal treatment on various used electronic devices was different,which was easy to cause the loss of arsenic. The oxidation of gallium on the surface of GaAs was easily caused by oxygen produced during the thermal decomposition of organic matter. Both of these pretreatment methods to remove organic matter were immature. In summary,the fire process had obvious advantages in recovering GaAs scrap with less impurities. But the industrial recovery of GaAs waste was still dominated by the more selective wet process at present. Based on the huge production and consumption of GaAs in China and the current situation of recycling various types of GaAs wastes,it was believed that there were still challenges in terms of recycling cost,safety,efficiency and product purity. In the future,the development of high performance and low cost extractants and chelating resins for wet process should be focused on. The scale of thermal recovery should be expanded,the arsenic condensation process should be optimized,and the purity of the recovered product should be balanced with the recovery rate. The special equipment for pretreatment of used GaAs electronic devices should be developed and gradually applied in industrial production. The properly combining wet and fire recycling processes to comprehensively improve the recycling efficiency of GaAs wastes. The development of China's semiconductor wastes recycling industry would be promoted towards high yield and efficiency.

KeyWords AITranslate

GaAs waste separation of arsenic and gallium secondary resources recycling

[1]Chen X,Wang D K,Wang T,Yang Z Y,Zou X M,Wang P,Luo W J,Li Q,Liao L,Hu W D,Wei Z P. Enhanced photoresponsivity of a GaAs nanowire metal-semiconductor-metal photodetector by adjusting the fermi level[J].ACS Applied Materials & Interfaces,2019,11(36):33188.

[2]马帅兵,刘付朋,陈飞雄. 改性花生壳吸附分离湿法炼锌溶液中的镓和锗[J].有色金属科学与工程,2022,13(1):18.

S B Ma,F P Liu,F X Chen. Separation of Ga and Ge from leachate in zinc hydrometallurgy by modified peanut shells adsorption[J].Nonferrous Metals Science and Engineering,2022,13(1):18.

[3]Yoon J,Jo S,Chun I S,Jung I,Kim H,Meitl M,Menard E,Li X L,Coleman J J,Paik U,Rogers J A. GaAs photovoltaics and optoelectronics using releasable multilayer epitaxial assemblies[J].Nature,2010,465(7296): 329.

[4]Ramos-Ruiz A,Field J A,Sun W J,Sierra-Alvarez R. Gallium arsenide (GaAs) leaching behavior and surface chemistry changes in response to pH and O2[J].Waste Management,2018,77:1.

[5]Uryu T,Yoshinaga J,Yanagisawa Y. Environmental fate of gallium arsenide semiconductor disposal[J].Journal of Industrial Ecology,2003,7(2):103.

[6]Trivedi H,Meshram A,Gupta R. Recycling of photovoltaic modules for recovery and repurposing of materials[J].Journal of Environmental Chemical Engineering,2023,11(2):109501.

[7]Lee H S,Nam C W. A study on the extraction of gallium from gallium arsenide scrap[J].Hydrometallurgy,1998,49(1):125.

[8]Zhan L,Zhang Y L,Ahmad Z,Xu Z M. Novel recycle technology for recovering gallium arsenide from scraped integrated circuits[J].ACS Sustainable Chemistry & Engineering,2020,8(7):2874.

[9]Zhan L,Wang Z Y,Zhang Y L,Xu Z M. Recycling of metals (Ga,In,As and Ag) from waste light-emitting diodes in sub/supercritical ethanol[J].Resources Conservation and Recycling,2020,155:104695.

[10]Zhang L E,Xu Z M. Separating and recycling plastic,glass,and gallium from waste solar cell modules by nitrogen pyrolysis and vacuum decomposition[J].Environmental Science & Technology,2016,50(17):9242.

[11]Lee M S,Ahn J G,Oh Y J. Production of high-purity indium and gallium metals by vacuum refining[J].Materials Transactions,2005,43(12):3195.

[12]刘建文. 内蒙古某难选冶铅锌矿石选矿试验研究[J].黄金,2022,43(11):77.

J W Liu. Experimental study on the beneficiation of a refractory lead zinc ore from Inner Mongolia[J].Gold,2022,43(11):77.

[13]Wang Y L,Xiao L,Liu H X,Qian P,Ye S F,Chen Y F. Acid leaching pretreatment on two-stage roasting pyrite cinder for gold extraction and co-precipitation of arsenic with iron[J].Hydrometallurgy,2018,179:192.

[14]Webb M,Jeynes C,Gwilliam R M,Tabatabaian Z,Royle A,Sealy B J. The influence of the ion implantation temperature and the flux on smart-cut in GaAs[J].Nuclear Instruments and Methods in Physics Research Section B:Beam Interactions with Materials and Atoms,2005,237(1-2):193.

[15]Huang Y,Luo J L,Ivey D G. Comparative study of GaAs corrosion in H2SO4 and NH3·H2O solutions by electrochemical methods and surface analysis[J].Materials Chemistry and Physics,2005,93(2-3):429.

[16]Lu F H,Xiao T F,Ning J L,Xiao Q L,Huang F,Wang W K,Xiao Q X,Lan X L,Chen H Y. Resources and extraction of gallium:a review[J].Hydrometallurgy,2017,174:105.

[17]Alonso E,Sherman A M,Wallington T J,Everson M P,Field F R,Roth R,Kirchain R E. Evaluating rare earth element availability:a case with revolutionary demand from clean technologies[J].Environmental Science & Technology,2012,46(6):3406.

[18]Eheliyagoda D,Zeng X L,Wang Z S,Albalghiti E,Li J H. Forecasting the temporal stock generation and recycling potential of metals towards a sustainable future:the case of gallium in China[J].Science of the Total Environment,2019,689:332.

[19]Tunez F M,Gonzalez J A,Ruiz M. Thermogravimetric study of GaAs chlorination between -30 and 900 ℃[J].Thermochimica Acta,2011,523(1):124.

[20]Knoben W,Brongersma S H,Crego-Calama M. Preparation and characterization of octadecanethiol self-assembled monolayers on indium arsenide (100)[J].Journal of Physical Chemistry C,2009,113(42):18331.

[21]Liao T Q,Xi Y H,Zhang L B,Li J,Cui K H. Removal of toxic arsenic (As(Ⅲ)) from industrial wastewater by ultrasonic enhanced zero-valent lead combined with CuSO4[J].Journal of Hazardous Materials,2020,408(1):124464.

[22]Loukola-Ruskeeniemi K,Müller I,Reichel S,Jones C,Battaglia-Brunet F.Elert M,Guédard M L,Hatakka T,Hellal J,Jordan I. Risk management for arsenic in agricultural soil-water systems:lessons learned from case studies in Europe[J].Journal of Hazardous Materials,2021,424:127677.

[23]Shi T T,He J L,Zhu R B,Yang B,Xu B Q. Arsenic removal from arsenic-containing copper dust by vacuum carbothermal reduction-vulcanization roasting[J].Vacuum,2021,(2):110213.

[24]张吉祥,卢文鹏,李瑞冰. 有色冶炼含砷废渣的脱砷现状及展望[J].铜业工程,2022,(3):53).

J X Zhang,W P Lu,R B Li. Status and prospect of arsenic removal from the arsenic-containing residue in nonferrous smelting process[J].Copper Engineering,2022,(3):53.

[25]Cai D W,Kong S Q,Shao Y X,Liu J J,Liu R Q,Wei X G,Bai B,Werner D,Gao X B,Li C C. Mobilization of arsenic from As-containing iron minerals under irrigation:effects of exogenous substances,redox condition,and intermittent flow[J].Journal of hazardous materials,2022,440:129736.

[26]张鸽,苗雨,张弛,林星杰,谭海伟,李昉泽,庞治坤. 高砷废渣中砷的稳定化[J].有色金属工程,2024,14(7):157.

G Zhang,Y Miao,C Zhang,H W Tan,F Z Li,Z K Pang. Stabilization of As in high arsenic waste slag[J].Nonferrous Metals Engineering,2024,14(7):157.

[27]Dropka N,Ecklebe S,Holena M. Real time predictions of VGF-GaAs growth dynamics by LSTM neural networks[J].Crystals,2021,11(2):138.

[28]Barth S,Hernandez-Ramirez F,Holmes J D,Romano-Rodriguez A. Synthesis and applications of one-dimensional semiconductors[J].Progress in Materials Science,2010,55(6):563.

[29]Kondratenko V S,Borisovskiy V Y,Naumov A S. New laser cutting technology of sapphire wafers on crystals[J].Advanced Materials Research,2013,2291(660):30.

[30]胡亮. 砷化镓真空热分解过程研究[D].昆明:昆明理工大学,2014. 1.

L Hu. Study on Vacuum Thermal Decomposition of Gallium Arsenide[D].Kunming:Kunming University of Science and Technology,2014. 1.

[31]Chang Y W,Zhang M,Deng C,Men C L,Chen D,Zhu L,Yu W J,Wei X,Di Z F,Wang X. Fabrication of high quality GaAs-on-insulator via ion-cut of epitaxial GaAs/Ge heterostructure[J].Applied Surface Science,2015,346(15):46.

[32]Chen W S,Tien K W,Wang L P,Lee C H,Chung Y F. Recovery of gallium from simulated GaAs waste etching solutions by solvent extraction[J].Sustainability,2020,12:1765.

[33]Torrance K W,Keenan H E,Sefcil J,Hursthouse A. Characterization of arsenic-rich waste slurries generated during GaAs wafer lapping and polishing[J].CS ManTech,2009.https://www.researchgate.net/publication/237556994

[34]Swain B,Mishra C,Kang L,Park K,Lee C G,Hong H S. Recycling process for recovery of gallium from GaN an e-waste of LED industry through ball milling,annealing and leaching[J].Environmental Research,2015,138:410.

[35]Oliveira R,Benvenuti J,Espinosa D. A review of the current progress in recycling technologies for gallium and rare earth elements from light-emitting diodes[J].Renewable and Sustainable Energy Reviews,2021,145:111090.

[36]Maarefvand M. Recovery of gallium from waste LEDs by oxidation and subsequent leaching[J].Hydrometallurgy,2020,191:105230.

[37]谭明亮,李胜春,潘勇进,刘凯华. 一种砷化镓废料的回收方法[P].中国:CN 201810652482.7,2018.

M L Tan,S C Li,Y J Pan,K H Liu. A method for recovering gallium arsenide waste[P].China:CN 201810652482.7,2018.

[38]Chen W T,Chu Y C,Wei J M,Tsai L C,Tsai F C,Lin C P,Shu C M. Gallium and arsenic recovery from waste gallium arsenide by wet refined methods[J].Advanced Materials Research,2011,194:2115.

[39]Hu S H,Xie M Y,Hsieh Y M,Liou Y S,Chen W S. Resource recycling of gallium arsenide scrap using leaching-selective precipitation[J].Environmental Progress & Sustainable Energy,2015,34(2):471.

[40]郭学益,李平,黄凯,刘荣义. 从砷化镓工业废料中回收镓和砷的方法[P].中国:CN 200510031531.8,2005.

X Y Guo,P Li,K Huang,R Y Liu. Methods for recovering gallium and arsenic from gallium arsenide industrial waste[P].China:CN 200510031531.8,2005.

[41]邹铭金,李栋,田庆华,郭学益,许志鹏,岳喜龙. 从二次资源中分离回收镓的研究进展[J].有色金属科学与工程,2020,11(5):7.

M J Zou,D Li,Q H Tian,X Y Guo,Z P Xu,X L Yue. Research progress on separation and recovery of gallium from secondary resources[J].Nonferrous Metals Science and Engineering,2020,11(5):7.

[42]Binnemans K,Jones P T. Solvometallurgy:an emerging branch of extractive metallurgy[J].Journal of Sustainable Metallurgy,2017,3:570.

[43]Cheng T H,Liu C J,Tsai T Y,Shen Y H. A process for the recovery of gallium from gallium arsenide scrap[J].Processes,2019,7(12):921.

[44]Maneesuwannarat S,Vangnai A S,Yamashita M,Thiravetyan P. Bioleaching of gallium from gallium arsenide by Cellulosimicrobiurn funkei and its application to semiconductor/electronic wastes[J].Transactions of The Institution of Chemical Engineers.Process Safety and Environmental Protection,2016,(99):80.

[45]董颖博,赵钰,林海,潘翰林,崇诗佳. 微生物浸出法从石煤提钒尾渣中回收钒和铜的研究[J].稀有金属,2022,46(5):619.

Y B Dong,Y Zhao,H Lin,S J Chong. Recovery of vanadium and copper from vanadium tailings from stone coal by microbial leaching[J].Chinese Journal of Rare Metals,2022,46(5):619.

[46]Cui J. Zhang L. Metallurgical recovery of metals from electronic waste:a review[J].Journal of Hazardous Materials,2008,(2/3):158.

[47]Koohestani B,Darban A K,Mokhtari P,Darezereshki E,Yilmaz E,Yilmaz E. Influence of hydrofluoric acid leaching and roasting on mineralogical phase transformation of pyrite in sulfidic mine tailings[J].Minerals,2020,10(6):513.

[48]Monteiro O R,Evans J W. Thermal oxidation of gallium arsenide[J].Journal of Vacuum Science Technology,1989,7(1):49.

[49]Swain B,Lee D H,Lee C G,Park K S. Detoxification of GaAs bearing waste LED and recovery of metal values through understanding the thermodynamics and chemistry:a perspective[J].Waste and Biomass Valorization,2021,12(4):2769.

[50]Chen W T,Tsai L C,Tsai F C,Shu C M. Recovery of gallium and arsenic from gallium arsenide waste in the electronics industry[J].Clean-Soil,Air,Water,2012,40(5):531.

[51]Zhan L,Li J G,Xie B,Xu Z M. Recycling arsenic from gallium arsenide scraps through sulfurizing thermal treatment[J].ACS Sustainable Chemistry & Engineering,2017,5(4):3179.

[52]吕飞,杜昊,曲涛,施磊,田源,戴永年. 真空碳热还原锂辉石矿提取Li同时回收Si和Al的探究[J].稀有金属,2023,47(4):547

F Lv,H Du,T Qu,L Shi,Y Tian,Y N Dai. Vacuum carbothermal reduction of spodumene ore to extract li and simultaneous recovery of Si and Al[J].Chinese Journal of Rare Metals,2023,47(4):547.

[53]Sturgill J A,Swartzbaugh J T,Randall P M. Pollution prevention in the semiconductor industry through recovery and recycling of gallium and arsenic from GaAs solid wastes[J].Clean Products & Processes,1999,1(4):248.

[54]刘大春,杨斌,戴永年,刘自力,刘永成,吴昆华. 真空法处理砷化镓废料回收镓的研究[J].真空,2004,(3):18.

D C Liu,B Yang,Y N Dai,Z L Liu,Y C Liu,K H Wu. Study on recovery of gallium from gallium arsenide waste by vacuum treatment[J].Vacuum.2004,(3):18.

[55]Liu D C,Zha G Z,Hu L,Jiang W L. Recovery of gallium and arsenic from gallium arsenide semiconductor scraps [A]. Energy Technology 2018:Carbon Dioxide Management and Other Technologies [C].Phoenix:TMS Annual Meeting & Exhibition,2018. 319.

[56]胡亮,刘大春,陈秀敏,杨斌,白平平,段少飞. 砷化镓真空热分解的理论计算与实验[J].中国有色金属学报,2014,24(9):2410.

L Hu,D C Liu,X M Chen,B Yang,P P Bai,S F Duan. Thermal decomposition of gallium arsenide under vacuum:theoretical calculation and experiment[J].The Chinese Journal of Nonferrous Metals,2014,24(9):2410.

[57]田阳,于昊松,杨斌,陈秀敏,徐宝强,蒋文龙,李一夫,王飞,邓勇,王立鹏,梁栋,王东. 一种回收砷和镓的装置及方法[P].中国:CN 115451700 A,2022.

Y Tian,H S Yu,B Yang,X M Chen,B Q Xu,W L Jiang,Y F Li,F Wang,Y Deng,L P Wang,D Liang,D Wang. A device and method for recovering arsenic and gallium[P].China:CN 115451700 A,2022.

[58]张环,李一夫,徐俊杰,蒲正浩,杨斌. 真空条件下砷冷凝机理的研究[J].昆明理工大学学报(自然科学版),2019,44(1):12.

H Zhang,Y F Li,J J Xu,Z H Pu,B Yang. A study on mechanism of arsenic condensation under vacuum[J].Journal of Kunming University of Science and Technology (Natural Science),2019,44(1):12.

[59]王金灵,周铁军,严卫东,马金峰. 一种砷化镓废料回收制备砷化镓多晶的方法[P].中国:CN 111575788 A,2020.

J L Wang,T J Zhou,W D Yan,J F Ma. A method for recovering gallium arsenide waste to prepare gallium arsenide polycrystals[P].China:CN 111575788 A,2020.

[60]张向京,刘迎祥,金君素,田学芳. 用聚合硅酸铁处理砷化镓生产废水的研究[J].化工环保,2003,23(5):257.

X J Zhang,Y X Liu,J S Jin,X F Tian. Study on treatment of gallium arsenide production[J].Environmental Protection of Chemical Industry,2003,23(5):257.

[61]Li S P,Kang Y. Impacts of key preparation factors on polymerization and flocculation performance of polyferric silicate sulfate (PFSiS)[J].Colloids and Surfaces A:Physicochemical and Engineering Aspects,2022,635:128109.

[62]Ding C J,Xie A J,Yan Z,Li X Y,Zhang H F,Tang N. Treatment of water-based ink wastewater by a novel magnetic flocculant of boron-containing polysilicic acid ferric and zinc sulfate[J].Journal of Water Process Engineering,2021,40(7):101899.

[63]Cao P,Long H,Zhang M X,Zheng Y J. Separation and recovery of iron and arsenic from acid leaching wastewater by valence state transformation[J].Journal of Environmental Chemical Engineering,2021,(10):105871.

[64]Matovu J B,Ong P,Leunissen L H A,Krishnan S,Babu S V. Fundamental investigation of chemical mechanical polishing of GaAs in silica dispersions:material removal and arsenic trihydride formation pathways[J].ECS Journal of Solid-State Science and Technology,2013,2(11):432.

[65]Sturgill J A,Swartzbaugh J T,Randall P M. Pollution prevention in the semiconductor industry through recovery and recycling of gallium and arsenic from GaAs polishing wastes[J].Clean Products and Processes,2000,2:18.

[66]Takaya Y,Kadokura M,Kato T,Tokoro C. Removal Mechanisms of Arsenite by Coprecipitation with ferrihydrite[J].Journal of Environmental Chemical Engineering,2021,9(5):105819.

[67]张向京,刘迎祥,田学芳. 砷化镓废渣生产氧化镓的试验研究[J].矿产综合利用,2005,(1):5.

X J Zhang,Y F Liu,X F Tian. A study on the preparation of gallium oxide from gallium arsenide scrap[J].Multipurpose Utilization of Mineral Resources,2005,(1):5.

[68]吴彤,朱炳龙,岳喜龙,童霏,樊红杰,秦恒飞,吴娟,李静,周全法. 从砷化镓废渣中制备砷酸钠和金属镓的实验研究[J].常州工学院学报,2019,32(6):5.

T Wu,B L Zhu,X L Yue,F Tong,H J Fan,H F Qin,J Wu,J Li,Q F Zhou. The experimental research on the preparation of Na3AsO4·12H2O and gallium metal from gallium arsenide scrap[J].Journal of Changzhou Institute of Technology,2019,32(6):5.

[69]Aziziyan M R,Sharma H,Dubowski J J. Photo-atomic layer etching of GaAs/AlGaAs nanoheterostructures[J].ACS Applied Materials & Interfaces,2019,11(19):17968.

[70]方鸿源. 废弃物砷化镓的镓及砷纯化回收方法[P].中国:CN 101857918 A,2010.

H Y Fang. Purification and recovery of gallium and arsenic from waste gallium arsenide[P].China:CN 101857918 A,2010.

[71]陈辉,殷亮,熊平,朱刘. 从砷化镓污泥中回收镓的实验研究[J].广东化工,2018,45(10):87.

H Chen,L Yin,P Xiong,L Zhu. The experimental research on the gallium recovery from gallium arsenide sludge[J].Guangdong Chemical Industry,2018,45(10):87.

[72]汪丽红,李琴香,黄华强,朱刘. 从含油砷化镓泥浆中回收镓的方法[P].中国:CN 106498168 B,2018.

L H Wang,Q X Li,H Q Huang,L Zhu. Method of recovering gallium from oily gallium arsenide slurry[P].China:CN 106498168 B,2018.

[73]Jameel D A,Felix J F,Aziz M,Saqri N A,Taylor D,de Azevedo W M,da Silva E F Jr,Albalawi H,Alghamdi H,Mashary F A,Henini M. High-performance organic/inorganic hybrid heterojunction based on gallium arsenide (GaAs) substrates and a conjugated polymer[J].Applied Surface Science,2015,357:2189.

[74]普世坤,黄平,柳廷龙,包文瑧,吴王昌,林作亮,李正美,罗新华,杨志美. 含锗砷化镓废料的处理回收方法[P].中国:CN 109722542 B,2020.

S K Pu,P Huang,T L Liu,W Z Bao,W C Wu,Z L Lin,Z M Li,X H Luo,Z M Yang. Treatment and recovery method of waste containing germanium and gallium arsenide[P].China:CN 109722542 B,2020.

[75]Zhang Y L,Zhan L,Xie B,Xu Z M,Chen C. Decomposition of packaging materials and recycling GaAs from waste ICs by hydrothermal treatment[J].ACS Sustainable Chemistry & Engineering,2019,7(16):14111.

[76]van den Bossche A,Vereycken W,Vander Hoogerstraete T,Dehaen W,Binnemans K. Recovery of gallium,indium,and arsenic from semiconductors using tribromide ionic liquids[J].ACS Sustainable Chemistry & Engineering,2019,7(17):144519.

[77]Zhan L,Xia F F,Xia Y H,Xie B. Recycle gallium and arsenic from GaAs-based E-wastes via pyrolysis–vacuum metallurgy separation:theory and feasibility[J].ACS Sustainable Chemistry & Engineering,2018,6(1):1336.

[78]Fedorov V A,Kozlov S A,Potolokov N A,Nikolashin S V. Preparation of high-purity gallium from semiconductor fabrication waste[J].Inorganic Materials,2006,42:S70.

[79]Ji W T,Xie K Q,Yan S Y,Huang H Y,Chen H L. A new method of recycling gallium from yellow phosphorus flue dust by vacuum thermal reduction process[J].Journal of Hazardous Materials,2020,400:123234.

[80]潘勇进,李胜春,刘凯,谭明亮. 一种从含有砷化镓的废料中回收砷和镓的方法[P].中国:CN 108707927 A,2018.

Y J Pan,S C Li,K Liu,M L Tan. A method for recovering arsenic and gallium from waste containing gallium arsenide[P].China:CN 108707927 A,2018.

Basic Information:

DOI:10.13373/j.cnki.cjrm.XY23050001

Chinese Library Classification Number:TF09

Citation Information:

With the progress and development of science and technology,the second-generation semiconductor materials represented by gallium arsenide (GaAs) have gradually replaced silicon materials in electronic communications,national defense,aerospace and other fields. Every year,a large amount of GaAs wastes are generated from the crystal growth in upstream,design and processing in midstream and scrap in downstream of the GaAs industry chain. Without in time treatment,the arsenic in GaAs wastes may enter the soil or groundwater with human activities and geological processes,posing a threat to the natural environment and human health. GaAs wastes are one of the main sources of arsenic and gallium resources because of its high grade and large stock. The clean and efficient recycling of GaAs wastes have received wide attention in recent years. This article started from the perspective of the gallium arsenide industry chain,the different recovery processes of GaAs crystal cutting scrap from upstream,GaAs processing wastes from midstream and used GaAs electronic devices were reviewed. The purity of GaAs scrap produced by cutting in the upstream of the industry chain was high,both wet and fire processes could achieve effective separation and recovery of arsenic and gallium. Acid leaching of GaAs cutting scrap,combined with selective precipitation,extraction,resin adsorption and alkaline electrolysis to recover gallium was a relatively mature technology for industrial recovery of GaAs at present. However,a large amount of acidic solution was added in the wet process and the generation of arsenic-containing waste water was inevitable. The processing process and production costs would increase as a result. In contrast,the fire process had shorter processes and simpler operations. But the oxidation roasting method and sulfurization heat treatment method also had the possibility of producing toxic gases containing arsenic. As a new method in recent years,the vacuum decomposition method recovered gallium and arsenic directly in elemental form under vacuum conditions,which had obvious advantages in terms of safety and efficiency,and it was one of the most promising GaAs recovery processes at present. However,the presence of GaAs clusters always affected the recovery rate,and further in-depth study was still needed. GaAs processing process in the middle reaches of the industrial chain such as cutting and grinding generated a large amount of GaAs containing waste water. The composition of waste slag and sludge from GaAs processing waste water by coagulation and sedimentation of iron compounds were complex. Impurities such as mixed iron had a major impact on the subsequent recovery process. Therefore,iron removal became a key issue in the recovery of GaAs processing wastes. Additives with stronger binding ability to Ga3+ were usually selected to extract gallium. Sometimes,arsenic and gallium resources in GaAs processing wastes were also prepared into compound products such as gallium oxide and sodium arsenate crystals. It was beneficial to shorten the waste recovery process,reduce the treatment cost and the discharge of arsenic-containing waste liquid. At the same time,it met the needs of gallium oxide semiconductor,sodium arsenate drugs and other aspects of China. In the downstream of the industry chain,GaAs was encased in organic casings in used electronic devices such as light-emitting diodes (LED),integrated circuits (ICs) and solar cells. The efficient removal of organic matter from used GaAs containing devices,extraction of GaAs and recycling of arsenic and gallium had become a research hotspot for many scholars. The hydrothermal treatment and thermal decomposition were the main methods to remove surface organic matter. The treatment effect of hydrothermal treatment on various used electronic devices was different,which was easy to cause the loss of arsenic. The oxidation of gallium on the surface of GaAs was easily caused by oxygen produced during the thermal decomposition of organic matter. Both of these pretreatment methods to remove organic matter were immature. In summary,the fire process had obvious advantages in recovering GaAs scrap with less impurities. But the industrial recovery of GaAs waste was still dominated by the more selective wet process at present. Based on the huge production and consumption of GaAs in China and the current situation of recycling various types of GaAs wastes,it was believed that there were still challenges in terms of recycling cost,safety,efficiency and product purity. In the future,the development of high performance and low cost extractants and chelating resins for wet process should be focused on. The scale of thermal recovery should be expanded,the arsenic condensation process should be optimized,and the purity of the recovered product should be balanced with the recovery rate. The special equipment for pretreatment of used GaAs electronic devices should be developed and gradually applied in industrial production. The properly combining wet and fire recycling processes to comprehensively improve the recycling efficiency of GaAs wastes. The development of China's semiconductor wastes recycling industry would be promoted towards high yield and efficiency.

quote

GB/T 7714-2015 [1] Haosong Yu, Yang Tian, Bin Yang, et al. Research Progress in Recovery and Regeneration of Gallium Arsenide Waste[J]. Chinese Journal of Rare Metals, 2024, 48(12): 1781-1796. DOI:10.13373/j.cnki.cjrm.XY23050001.
MLA [1] Haosong Yu, et al., "Research Progress in Recovery and Regeneration of Gallium Arsenide Waste." Chinese Journal of Rare Metals, vol. 48, no. 12, 2024, pp. 1781-1796, https://doi.org/10.13373/j.cnki.cjrm.XY23050001.
APA [1] Haosong Yu, Yang Tian, Bin Yang, Baoqiang Xu, Xiumin Chen, & Tengteng Shi. (2024). Research Progress in Recovery and Regeneration of Gallium Arsenide Waste. Chinese Journal of Rare Metals, 48(12), 1781-1796. https://doi.org/10.13373/j.cnki.cjrm.XY23050001
IEEE [1] Haosong Yu, Yang Tian, Bin Yang, Baoqiang Xu, Xiumin Chen, and Tengteng Shi, "Research Progress in Recovery and Regeneration of Gallium Arsenide Waste," Chinese Journal of Rare Metals, vol. 48, no. 12, pp. 1781-1796, 2024, doi: 10.13373/j.cnki.cjrm.XY23050001. keywords: {GaAs waste;separation of arsenic and gallium;secondary resources;recycling}