Computer simulation of sputtering and oxygen desorption processes at grazing ion bombardment of Ag( 1 1 0 ) surface AITranslate

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DOI：https://doi.org/10.1016/S0927-0256(02)00434-2

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The ion sputtering and oxygen desorption processes at 5 keV Ne ion bombardment of clean and O2 covered Ag(1 1 0) surface have been investigated by computer simulation. The trajectories of the colliding particles were constructed as a sequence of binary collisions. The influence of surface potential barrier on the non-dissociative desorption yield has been studied and it was observed that the basic part of ion-impact desorbed particles overcomes a potential barrier. The sputtering yield of Ag atoms and the non-dissociative O2 desorption yield versus the azimuth angle of incidence at grazing ion bombardment have been presented. It was shown that these dependencies correlate the orientation of crystal. At grazing ion bombardment the particles are ejected on azimuth angle mainly along the normal of plane of incidence.