Research Progress of Traditional Grating Preparation Technology and Amorphous Alloy Grating Preparation AITranslate

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Basic Information:

DOI：10.13373/j.cnki.cjrm.XY23010007

Chinese Library Classification Number:TG139+.8

Citation Information:

The feature size of micro-optical elements is typically on the order of microns or nanometers. Due to the development of micro- and nano-detection and test systems for industrial，commercial and civil applications in the last decade，researchers have conducted detailed and in-depth studies on increasingly miniaturized and integrated micro-optical components and systems，and the rapidly developing microelectronic manufacturing processes have contributed to the design，fabrication and application of micro-optical components. As a used basic optical element，optical grating consists of a large number of equal-width，equally spaced slits arranged periodically，and has four basic functions of dispersion，beam splitting，polarization and phase matching. Although the classical concept of diffraction grating is simple，its connotation is extremely rich. Over the years，gratings have been used for much more than their traditional applications，becoming irreplaceable and important components in many fields of technology. For example，gratings are used in integrated optics，optical holography，spectral analysis，fuzzy processing，digital-to-analog conversion correlation storage，beam coupling，beam sampling，beam splitting，data storage optical testing，bit-phase co-choking，mode-locking，signal processing，solar focused spatial light modulation，optical switching，diagnostic measurements，image recognition，and many more，while gratings continue to be used in new areas. With the development of science and technology，the requirements for grating are constantly improving. At present，many micro-opto-mechanical systems containing optical components are developing toward miniaturization，integration and arraying，so the size of many optical components is also reduced，such as micro-lens arrays，micro-nano gratings，etc. Therefore，the use of new materials for grating preparation and the development of new grating preparation techniques are crucial. Metallic glass has generated a great deal of research，while creating an increasing number of new opportunities for various basic research and commercial applications. Metallic glasses，also known as amorphous alloys，are new metallic materials in which atoms lose their long-range order and maintain their short-range order in three-dimensional space. The inherent structure and properties of metallic glasses further broaden their development field. Compared to crystalline materials，metallic glasses have a unique structure，which gives them many unique physical，chemical and mechanical properties and is one of the most active areas of research in the materials and physics communities today. Metallic glasses possess an amazing property that is not found in traditional metallic materials，which greatly compensates for the lack of mechanical properties of metallic glasses at room temperature and allows us to process this material more easily than traditional metals. This amazing property of metallic glass is its ability to soften after heating to a certain temperature，like glass or plastic，and is called the thermoplastic nature of metallic glass. The viscosity of metallic glass decreases significantly with increasing temperature，so that after heating to a certain temperature （also known as the supercooled liquid region），it can be molded at temperatures and stresses much lower than those required for conventional metal processing. In addition，metallic glass has no dislocations，grain boundaries and other crystalline defects，and its low coefficient of thermal expansion ensures excellent dimensional accuracy in thermoplastic molding，which makes it possible to produce precise microstructures on its surface by thermoplastic molding technology. At the same time，the researchers found that metallic glass has the advantages of high preparation efficiency （molding cycle in seconds，usually less than 30 s），good molding accuracy （dimensional error of about 2%），excellent surface quality （surface roughness of about 10 nm or less），simple process and low cost，etc.，so it has a very broad application prospect in the field of medicine，precision instruments and especially the emerging microelectromechanical systems. Based on this，metallic glasses have injected new blood into the preparation of gratings. Metallic glass has an exceptional surface finish after thermoplastic forming and is significantly more productive than conventional methods. Compared to crystalline glasses，metallic glasses have a smooth and glossy surface，which makes them promising for preparing grating structures with higher performance than common metals （e.g.，pure nickel，etc.）. Compared to conventional materials such as polydimethylsiloxane and polymethyl methacrylate，the unique mechanical and physical properties of metallic glasses improve the grating quality. In summary，the selection of materials and preparation processes for grating at the micro and nano scale are of particular importance as the quality requirements for optical devices continue to increase. Metallic glasses are ideal materials for grating preparation，but related research is still in its infancy. In this paper，the definition，classification and application of grating were reviewed. And the research status and unsolved scientific problems of the fabrication technology for traditional grating technology and amorphous alloy grating were presented，and the development opportunities and challenges of amorphous alloy grating in the future were prospected. The discussion in this paper provided a theoretical basis for micro-electro-mechanical （MEMS） system，which showed important theoretical and practical significance to promote the engineering application of amorphous alloy as a new material.